Thermco Systems Ltd

Stand: G31
Your challenges. Our solutions. Furnace systems, chemical benches, epitaxy reactors and materials management equipment for power and wide-bandgap (SiC, GaN), MEMS and sensors, and photonics research fabs. Designed and built in-house, supported for the life of the tool. Furnace systems Horizontal & vertical diffusion furnaces Standard and advanced LPCVD Oxidation, diffusion, drive-in and anneal High-temperature processing, to 1350°C Full cassette-to-cassette automation PCMUX AI control, upgrades and retrofits Chemical process solutions Manual to fully automated benches Single wafer cleaning and surface tension drying Clean and etch: RCA, SC1/SC2, BHF/BOE, QDR Chemical delivery units, solvents and aqueous Metal lift off, porous Si and electroless deposition Standard and bespoke process chemistries
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