Sumitomo (SHI) Cryogenics of Europe Ltd

Stand: E61
SHI Cryogenics is a global leader in advanced closed-cycle cryogenic technology, delivering innovative solutions for the semiconductor industry. As the number one supplier of Sicera cryopumps for new PVD systems, our success is driven by technologies that improve sustainability and reduce operating costs, including multi-cryopump configurations powered by a single compressor. Our industry-leading in-vacuum robot technology, featuring in-house motor design, provides exceptional torque, reliability, and throughput across PVD, Etch, and CVD applications. Backed by Sumitomo’s extensive global service network, we provide responsive local support, ensuring customers receive reliable performance and expert assistance throughout the lifetime of their systems.
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